Shigeru Tahara
at Tokyo Electron Miyagi Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 30 April 2023 Presentation
Eric Liu, Akiteru Ko, Sophie Thibaut, Katie Lutker-Lee, Steven Grzeskowiak, Alexandra Krawicz, Christopher Cole, Hamed Hajibabaei, Sergey Voronin, Nayoung Bae, Angelique Raley, Lior Huli, Kanzo Kato, David Hetzer, Kathleen Nafus, Seiji Fujimoto, Seiji Nagahara, Satoru Shimura, Shinichiro Kawakami, Congque Dinh, Yuhei Kuwahara, Shigeru Tahara, Masanobu Honda, Tetsuya Nishizuka, Peter Biolsi, Hiromasa Mochiki
Proceedings Volume PC12499, PC124990H (2023) https://doi.org/10.1117/12.2659720
KEYWORDS: Etching, Optical lithography, Lithography, Extreme ultraviolet, Plasma etching, Plasma, Transistors, Semiconducting wafers, Photoresist processing, Photochemistry

Proceedings Article | 29 March 2013 Paper
Todd Younkin, Roel Gronheid, Paulina Rincon Delgadillo, Boon Teik Chan, Nadia Vandenbroeck, Steven Demuynck, Ainhoa Romo-Negreira, Doni Parnell, Kathleen Nafus, Shigeru Tahara, Mark Somervell
Proceedings Volume 8682, 86820L (2013) https://doi.org/10.1117/12.2012353
KEYWORDS: Etching, Semiconducting wafers, Polymers, Polymethylmethacrylate, Lithography, Wet etching, Dry etching, Chemical vapor deposition, Scanning electron microscopy, Directed self assembly

Proceedings Article | 29 March 2013 Paper
Werner Boullart, Dunja Radisic , Vasile Paraschiv, Sven Cornelissen, Mauricio Manfrini, Koichi Yatsuda, Eiichi Nishimura, Tetsuya Ohishi, Shigeru Tahara
Proceedings Volume 8685, 86850F (2013) https://doi.org/10.1117/12.2013602
KEYWORDS: Etching, Plasma, Plasma etching, Optical lithography, Ions, Wet etching, Ion beams, Magnetism, Chemistry, Tantalum

Proceedings Article | 29 March 2013 Paper
Proceedings Volume 8682, 86820K (2013) https://doi.org/10.1117/12.2012018
KEYWORDS: Etching, Polymethylmethacrylate, Manufacturing, Picosecond phenomena, Ecosystems, Semiconducting wafers, Inspection, Directed self assembly, Materials processing, Polymers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top