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This work demonstrates the versatility of this complete process of soft chemistry new process of patterning TiO2 and TiN thin films avoiding expensive processes (etching, lift-off…) while preserving their diffractive properties and a high thermal stability, up to 1000°C. It is thus compatible to various types of substrates (of different shape and size). These results open up the opportunity to develop a cost-effective and low time-consuming approach to address different fields of cutting-edge applications (metasurfaces, sensors, luxury and decorative industry…).
The proposed contribution will briefly discuss the use of gratings for spatial applications. One of the most important applications is in the measurement of displacement. Usual translation and rotation sensors are bulky devices, which impose a system breakdown leading to cumbersome and heavy assemblies. We are proposing a miniaturized version of the traditional moving grating technique using submicron gratings and a specific OptoASIC which enables the measurement function to be non-obtrusively inserted into light and compact electro-mechanical systems. Nanometer resolution is possible with no compromise on the length of the measurement range.
Another family of spatial application is in the field of spectrometers where new grating types allow a more flexible processing of the optical spectrum.
Another family of applications addresses the question of inter-satellite communications: the introduction of gratings in laser cavities or in the laser mirrors enables the stabilization of the emitted polarization, the stabilization of the frequency as well as wide range frequency sweeping without mobile parts.
This work will show that chip topography can be predicted from reticle density and perimeter density data, including experimental proof. Different pixel sizes are used to perform the correlation in-line with the minimum resolution, correlation length of CMP effects and the spot size of the scanner level sensor. Potential applications of the topography determination will be evaluated, including optimizing scanner leveling by ignoring non-critical parts of the field, and without the need for time-consuming offline topography measurements.
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