CONFERENCE PROCEEDINGS
Advanced Search
Ratish Rao Nagaraj Rao
at Lab Hubert Curien
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 24 May 2022 Poster + Paper
Development of chirp reduction technique for spherical beams interference lithography
Ratish Rao Nagaraj Rao, Thomas Kämpfe, Frederic Celle, Anton Savchenko, Emilie Gamet, Yves Jourlin
Proceedings Volume 12131, 121310T (2022) https://doi.org/10.1117/12.2621360
KEYWORDS: Spherical lenses, Lithography, Semiconducting wafers, Wavefronts, Wavefront aberrations, Fiber lasers, Silicon, Photoresist materials, 3D printing, Laser sources
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top