Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence

Olivier M. Parriaux; Y. Jourlin; Florent Pigeon; G. Bouchet; Paul W.L. Van Dijk; Rudy J. M. Pellens; Suat Topcu; Yasser Alayli; Marc Bonis

doi:10.1117/12.448042

9 November 2001 Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence

Olivier M. Parriaux, Y. Jourlin, Florent Pigeon, G. Bouchet, Paul W.L. Van Dijk, Rudy J. M. Pellens, Suat Topcu, Yasser Alayli, Marc Bonis

Author Affiliations +

Proceedings Volume 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication; (2001) https://doi.org/10.1117/12.448042
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The spatial coherence of optical gratings fabricated by means of a step & repeat camera is characterized by a diffractive interferometric displacement sensor using the grating under test as the grating scale. The displacement sensor head comprises two readout gratings at a definite distance from each other which allows the determination of the local deviation of the grating period with a resolution of 0.001 nanometer.

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Olivier M. Parriaux, Y. Jourlin, Florent Pigeon, G. Bouchet, Paul W.L. Van Dijk, Rudy J. M. Pellens, Suat Topcu, Yasser Alayli, and Marc Bonis "Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448042

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