Yigwon Kim
at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 April 2024 Presentation + Paper
Il Hwan Kim, Cheolgyu Hyun, Sangho Jo, Muyoung Lee, Ikjun Jang, Jongsu Kim, Jinhong Park, Yigwon Kim, Chang Min Park, Kevin Houchens, Jenny Perry, Nahum Bomshtein, Liad Anokov, Noam Oved, Uri Smolyan, Michael Shifrin, Tal Itzkovich, Jeong Ho Yeo, You Jin Kim, Baek Jun Kim
Proceedings Volume 12955, 129551I (2024) https://doi.org/10.1117/12.3010511
KEYWORDS: Design, Scanning electron microscopy, Overlay metrology, Monte Carlo methods, Electrons, Lithography, Precision measurement, Electron beam lithography, Design rules, Signal detection

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940V (2023) https://doi.org/10.1117/12.2658345
KEYWORDS: Etching, Extreme ultraviolet lithography, Metal oxides, Coating, Chemical reactions, Process control, Extreme ultraviolet

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 1249404 (2023) https://doi.org/10.1117/12.2656415
KEYWORDS: Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Lithography, Optical lithography, Photoresist processing, EUV optics, Chemical composition, Semiconductors

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