Jinhong Park
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (29)

Proceedings Article | 16 April 2024 Presentation + Paper
Il Hwan Kim, Cheolgyu Hyun, Sangho Jo, Muyoung Lee, Ikjun Jang, Jongsu Kim, Jinhong Park, Yigwon Kim, Chang Min Park, Kevin Houchens, Jenny Perry, Nahum Bomshtein, Liad Anokov, Noam Oved, Uri Smolyan, Michael Shifrin, Tal Itzkovich, Jeong Ho Yeo, You Jin Kim, Baek Jun Kim
Proceedings Volume 12955, 129551I (2024) https://doi.org/10.1117/12.3010511
KEYWORDS: Design, Scanning electron microscopy, Overlay metrology, Monte Carlo methods, Electrons, Lithography, Precision measurement, Electron beam lithography, Design rules, Signal detection

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540D (2024) https://doi.org/10.1117/12.3010045
KEYWORDS: Semiconducting wafers, Wafer bonding, Distortion, Overlay metrology, Matrices, Deformation, Engineering, Crystals, Chemical mechanical planarization, Silicon

Proceedings Article | 27 April 2023 Presentation + Paper
Sangho Jo, Jongsu Kim, Youngsik Park, Muyoung Lee, Jinhong Park, Changmin Park, Jeong-Ho Yeo, Yaniv Abramovitz, You Jin Kim, Asaf Shoham, Shmuel Ben Nissim
Proceedings Volume 12496, 124960K (2023) https://doi.org/10.1117/12.2657672
KEYWORDS: Scanning electron microscopy, Overlay metrology, Semiconducting wafers, Scanners, Optical parametric oscillators, Measurement devices, Lithography, Error control coding, Optical alignment, Metrology

Proceedings Article | 24 March 2017 Open Access Presentation + Paper
Seong-Sue Kim, Roman Chalykh, Hoyeon Kim, Seungkoo Lee, Changmin Park, Myungsoo Hwang, Joo-On Park, Jinhong Park, Hocheol Kim, Jinho Jeon, Insung Kim, Donggun Lee, Jihoon Na, Jungyeop Kim, Siyong Lee, Hyunwoo Kim, Seok-Woo Nam
Proceedings Volume 10143, 1014306 (2017) https://doi.org/10.1117/12.2264043
KEYWORDS: Extreme ultraviolet lithography, Manufacturing, Extreme ultraviolet, Pellicles, Photomasks, Transmittance, Logic, Scanners, Reticles, Chemical elements

Proceedings Article | 24 March 2009 Paper
Jeong-Ho Yeo, Byeong-Ok Cho, Jin-Hong Park, Jinseok Hur, Seok-Hoon Woo, Seungwoon Choi, Chan-Hoon Park
Proceedings Volume 7272, 72721U (2009) https://doi.org/10.1117/12.814024
KEYWORDS: Critical dimension metrology, Polarization, Semiconducting wafers, Inspection, Reflectivity, Silicon, Calibration, Process control, Denoising, Associative arrays

Showing 5 of 29 publications
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