Takashi Sasaki
at AGC Inc.
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 26 March 2008 Paper
Yoko Takebe, Naoko Shirota, Takashi Sasaki, Koichi Murata, Osamu Yokokoji
Proceedings Volume 6923, 69231U (2008) https://doi.org/10.1117/12.772525
KEYWORDS: Polymers, Immersion lithography, Sputter deposition, Polymer thin films, Interfaces, Photoresist processing, Polymerization, Lithography, Scanning electron microscopy, Ions

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 692347 (2008) https://doi.org/10.1117/12.772542
KEYWORDS: Polymers, Extreme ultraviolet lithography, Fluorine, Line edge roughness, Extreme ultraviolet, Etching, Chemical species, Polymerization, Spectroscopy, Lithography

Proceedings Article | 2 April 2007 Paper
Proceedings Volume 6519, 65191Y (2007) https://doi.org/10.1117/12.711867
KEYWORDS: Polymers, Fluorine, Immersion lithography, Thin film coatings, Lithography, Polymerization, Scanning electron microscopy, Polymer thin films, Optical lithography, Semiconducting wafers

Proceedings Article | 2 April 2007 Paper
Naoko Shirota, Yoko Takebe, Shu-Zhong Wang, Takashi Sasaki, Osamu Yokokoji
Proceedings Volume 6519, 651905 (2007) https://doi.org/10.1117/12.712057
KEYWORDS: Polymers, Immersion lithography, Polymer thin films, Polymerization, Photoresist processing, Coating, Fluorine, Imaging systems, Lithography, Semiconducting wafers

Proceedings Article | 29 March 2006 Paper
Proceedings Volume 6153, 615324 (2006) https://doi.org/10.1117/12.656234
KEYWORDS: Polymers, Diffusion, Fluorine, Immersion lithography, Crystals, Quartz, Silicon, Water, Data analysis, Oscillators

Showing 5 of 8 publications
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