Automatic on-line wafer stepper calibration system

Martin A. van den Brink; Hans Franken; Stefan Wittekoek; Theo Fahner

doi:10.1117/12.20056

1 June 1990 Automatic on-line wafer stepper calibration system

Martin A. van den Brink, Hans Franken, Stefan Wittekoek, Theo Fahner

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20056
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

This paper introduces a new wafer stepper on-line calibration sensor, the Image Sensor, which refers directly to the aerial reticle image at the exposure wavelength. This sensor system is integrated with other stepper metrology systems by a so-called Image Sensor fiducial plate, which interacts simultaneously with the aerial reticle image, the Image Sensor, the TTL alignment system and the focus sensor of the stepper. An integrated software package ensures on-line regular stepper calibration, eliminating dependance on environmental, process and time parameters. Unique in this concept is the direct measurement of the consequence of wavelength drift in excimer laser steppers by measuring the aerial image deformation at the exposure wavelength. This information is used as a direct feedback to the wavelength control of the laser. Initial results of this system are presented for both UV (365 nm) and DUV (248 nm) steppers.

Citation Download Citation

Martin A. van den Brink, Hans Franken, Stefan Wittekoek, and Theo Fahner "Automatic on-line wafer stepper calibration system", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20056

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available