Mr. Hans C. Franken Profile

Hans C. Franken

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 29 June 1998 Paper

Performance of an i-line step-and-scan system for sub-0.25-um mix-and-match applications

Peter van Oorschot, Bert Koek, Jeroen van der Spek, Eric Stuiver, Hans Franken, Herman Botter, Reiner Garreis

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310771

KEYWORDS: Deep ultraviolet, Distortion, Semiconducting wafers, Monochromatic aberrations, Reticles, Fiber optic illuminators, Control systems, Lamps, Lithography, Photoresist materials

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Proceedings Article | 1 June 1990 Paper

Automatic on-line wafer stepper calibration system

Martin van den Brink, Hans Franken, Stefan Wittekoek, Theo Fahner

Proceedings Volume 1261, (1990) https://doi.org/10.1117/12.20056

KEYWORDS: Image sensors, Sensors, Semiconducting wafers, Metrology, Calibration, Reticles, Monochromatic aberrations, Deep ultraviolet, Distortion, Optical alignment

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