Ms. YunJi Kim Profile

YunJi Kim

at Rohm and Haas Electronic Materials Korea Ltd

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators

Jayoung Koo, YunJi Kim, You Rim Shin, HyunHo Yoon, Philjae Kang, Ye Ri Han, Jong Keun Park, Karen Petrillo, Jae Hwan Sim

Proceedings Volume 12957, 129571C (2024) https://doi.org/10.1117/12.3010977

KEYWORDS: Chemical species, Materials properties, Light absorption, Mathematical optimization, Photoresist materials, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Electrons, Photoacid generators

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