Dr. Ye Ri Han Profile

Dr. Ye Ri Han

at DuPont

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators

Jayoung Koo, YunJi Kim, You Rim Shin, HyunHo Yoon, Philjae Kang, Ye Ri Han, Jong Keun Park, Karen Petrillo, Jae Hwan Sim

Proceedings Volume 12957, 129571C (2024) https://doi.org/10.1117/12.3010977

KEYWORDS: Photoacid generators, Electrons, Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Photoresist materials, Mathematical optimization, Light absorption, Materials properties, Chemical species

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