Terumasa Kosaka
R & D Engineer
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 25 March 2019 Paper
Proceedings Volume 10960, 109601I (2019) https://doi.org/10.1117/12.2514961
KEYWORDS: Polymerization, Picosecond phenomena, Polymers, Polymethylmethacrylate, Scanning electron microscopy, Directed self assembly, Semiconductors, Lithography, Metals

Proceedings Article | 19 March 2018 Presentation
Tsukasa Azuma, Yuriko Seino, Hironobu Sato, Yusuke Kasahara, Katsuyoshi Kodera, Ken Miyagi, Masayuki Shiraishi, Ryota Matsuki, Terumasa Kosaka, Toshiyuki Himi, Seiji Nagahara, Alvin Chandra, Ryuichi Nakatani, Teruaki Hayakawa, Kenji Yoshimoto, Takuya Omosu, Mikihito Takenaka
Proceedings Volume 10586, 105860S (2018) https://doi.org/10.1117/12.2297310
KEYWORDS: Directed self assembly, Image processing, Signal processing, Electron beam lithography, Lithography, Annealing, Thin films, Epitaxy, Data modeling, 3D modeling

Proceedings Article | 27 March 2017 Paper
Toshiyuki Himi, Ryota Matsuki, Terumasa Kosaka, Ryosuke Ogaki, Yukio Kawaguchi, Tetsuo Shimizu
Proceedings Volume 10146, 101461Z (2017) https://doi.org/10.1117/12.2258167
KEYWORDS: Directed self assembly, Polymerization, Lithography, Polymers, High volume manufacturing, Optical lithography, Semiconductors, Molecular self-assembly, Neodymium, Polymethylmethacrylate

Proceedings Article | 21 March 2016 Paper
T. Kosaka, Y. Kawaguchi, T. Himi, T. Shimizu, K. Hirahara, A. Takano, Y. Matsushita
Proceedings Volume 9779, 977916 (2016) https://doi.org/10.1117/12.2219125
KEYWORDS: Directed self assembly, Lithography, Polymerization, Transmission electron microscopy, Polymers, Nanolithography, Optical lithography, Materials processing, Silicon, X-rays, Light scattering, Scatter measurement

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