Dr. Atsushi Takano Profile

Dr. Atsushi Takano

at Nagoya University

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Publications (1)

Proceedings Article | 21 March 2016 Paper

Formation of microphase-separated structure with half pitch less than 5.0nm formed by multiblock copolymers for nanolithographic application

T. Kosaka, Y. Kawaguchi, T. Himi, T. Shimizu, K. Hirahara, A. Takano, Y. Matsushita

Proceedings Volume 9779, 977916 (2016) https://doi.org/10.1117/12.2219125

KEYWORDS: Directed self assembly, Lithography, Polymerization, Transmission electron microscopy, Polymers, Nanolithography, Optical lithography, Materials processing, Silicon, X-rays, Light scattering, Scatter measurement

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