Shinya Nakajima
at Toyama Prefectural Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 19 March 2018 Paper
Proceedings Volume 10584, 1058416 (2018) https://doi.org/10.1117/12.2297093
KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Transmittance, Manufacturing

Proceedings Article | 19 March 2018 Paper
Proceedings Volume 10584, 1058415 (2018) https://doi.org/10.1117/12.2295147
KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Silicon, Optical lithography, Oxygen, Quartz, Nanofibers, Scanning electron microscopy, Lithography, Industrial chemicals

Proceedings Article | 31 August 2017 Paper
Proceedings Volume 10354, 103541B (2017) https://doi.org/10.1117/12.2273270
KEYWORDS: Nanoimprint lithography

Proceedings Article | 31 August 2017 Paper
Proceedings Volume 10354, 103541F (2017) https://doi.org/10.1117/12.2273503
KEYWORDS: Crystals, Silicon, Composites, Metals, Crystallography

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