Nanoimprint lithography using gas permeable template II

Makoto Hanabata; Satoshi Takei; Shinya Nakajima; Naoto Sugino; Yoko Matsumoto; Atsushi Sekiguchi

doi:10.1117/12.2295147

19 March 2018 Nanoimprint lithography using gas permeable template II

Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi

Proceedings Volume 10584, Novel Patterning Technologies 2018; 1058415 (2018) https://doi.org/10.1117/12.2295147
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

We have been trying to improve nanoimprint lithography performance through modification of template materials. We have reported a biomass based template with gas permeability which decreases transcriptional defects on template materials caused by involved solvents and cracked gasses generated from imprinted materials. (SPIE2016 and 2017) The line patterning results using the biomass based gas permeable template were better to reduce the line pattern failure as compared with that of quartz based template as the standard reference. In this study, we will report a mechanical property improvement of the template by blending cellulose nanofiber (CNF) to the biomass template. The blended template showed improved gas transmission coefficient and mechanical properties than non-blended template. The proposed nanoimprint lithography using biomass based template with gas permeable and gaseous adsorption is one of the most promising processes ready to use for mass-production of nanoscale devices.

Citation Download Citation

Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, and Atsushi Sekiguchi "Nanoimprint lithography using gas permeable template II", Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058415 (19 March 2018); https://doi.org/10.1117/12.2295147

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available