Satoshi Tanaka
Group Manager at Gigaphoton Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530U (2024) https://doi.org/10.1117/12.3009846
KEYWORDS: Telecommunications, Standards development, Machine learning, Light sources, Data analysis, Speckle, Semiconductor manufacturing, Optics manufacturing, Instrument modeling, Immersion lithography

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962U (2023) https://doi.org/10.1117/12.2658043
KEYWORDS: Deep learning, Lithography, Data modeling, Performance modeling, Machine learning, Education and training, Excimer lasers, Device simulation

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 1132717 (2020) https://doi.org/10.1117/12.2551845
KEYWORDS: Diffraction gratings, Prisms, Diffraction, Actuators, Light sources, Control systems, Oscillators, Wavefronts, Beam expanders, Excimer lasers

Proceedings Article | 27 March 2019 Paper
Hiroaki Tsushima, Yousuke Fujimaki, Yasuaki Kiyota, Makoto Tanaka, Takashi Itou, Takeshi Asayama, Akihiko Kurosu, Satoshi Tanaka, Takeshi Ohta, Satoru Bushida, Takashi Saitou, Hakaru Mizoguchi
Proceedings Volume 10961, 109610X (2019) https://doi.org/10.1117/12.2515667
KEYWORDS: Electrodes, Excimer lasers, Lithography, Laser applications, Light sources, Semiconductors, Optical lithography, Semiconductor manufacturing, Semiconductor lasers, Laser development

Proceedings Article | 16 March 2016 Paper
Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai, Yoichi Sasaki, Takashi Onose, Yasuhiro Kamba, Hironori Igarashi, Chen Qu, Mitsuru Tamiya, Hiroaki Oizumi, Shinji Ito, Koji Kakizaki, Hongwen Xuan, Zhigang Zhao, Yohei Kobayashi, Hakaru Mizoguchi
Proceedings Volume 9726, 972624 (2016) https://doi.org/10.1117/12.2211210
KEYWORDS: Solid state lasers, Excimer lasers, Laser systems engineering, Deep ultraviolet, Optical amplifiers, Amplifiers, Crystals, High power lasers, Semiconducting wafers, Fiber amplifiers

SPIE Journal Paper | 29 May 2012
JM3, Vol. 11, Issue 02, 021111, (May 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021111
KEYWORDS: Gas lasers, Extreme ultraviolet, Tin, Carbon monoxide, Light sources, Pulsed laser operation, Extreme ultraviolet lithography, Magnetism, Ions, Laser applications

Proceedings Article | 22 September 2011 Paper
Alena Andryzhyieuskaya, John van Keulen, Tom van der Hoeff, Jeroen J. H. Linders, Michiel Kupers, Pablo Gabolde, Bart Smits, Takahito Kumazaki, Satoshi Tanaka, Hiroshi Tanaka, Junichi Fujimoto
Proceedings Volume 8167, 81671X (2011) https://doi.org/10.1117/12.898556
KEYWORDS: Semiconducting wafers, Laser drilling, Lithography, Fabry–Perot interferometers, Overlay metrology, Optical lithography, Extreme ultraviolet, Laser stabilization, Light sources, Scanners

Proceedings Article | 23 March 2011 Paper
Hiroshi Umeda, Hiroaki Tsushima, Hidenori Watanabe, Satoshi Tanaka, Masaya Yoshino, Shinich Matsumoto, Hiroshi Tanaka, Akihiko Kurosu, Yasufumi Kawasuji, Takashi Matsunaga, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 7973, 79731K (2011) https://doi.org/10.1117/12.879205
KEYWORDS: Reliability, Excimer lasers, Ecology, Immersion lithography, Double patterning technology, Laser development, Lithography, Laser applications, Light sources, High power lasers

Proceedings Article | 10 March 2010 Paper
Masaya Yoshino, Hiroshi Umeda, Hiroaki Tsushima, Hidenori Watanabe, Satoshi Tanaka, Shinich Matsumoto, Takashi Onose, Hiroyuki Nogawa, Yasufumi Kawasuji, Takashi Matsunaga, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 7640, 76402A (2010) https://doi.org/10.1117/12.846337
KEYWORDS: Reliability, Double patterning technology, Excimer lasers, High power lasers, Immersion lithography, Lithography, Pulsed laser operation, Laser stabilization, Laser applications, Laser development

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72743J (2009) https://doi.org/10.1117/12.813476
KEYWORDS: Lithography, Light sources, Double patterning technology, Laser optics, Line edge roughness, Spatial coherence, Speckle, Temporal coherence, Immersion lithography, Critical dimension metrology

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72743L (2009) https://doi.org/10.1117/12.813642
KEYWORDS: Reliability, Oscillators, Light sources, Fluorine, Laser applications, Double patterning technology, Optical amplifiers, High power lasers, Excimer lasers, Immersion lithography

Proceedings Article | 11 April 2008 Paper
Masaya Yoshino, Hiroaki Nakarai, Takeshi Ohta, Hitoshi Nagano, Hiroshi Umeda, Yasufumi Kawasuji, Toru Abe, Ryoichi Nohdomi, Toru Suzuki, Satoshi Tanaka, Yukio Watanabe, Taku Yamazaki, Shinji Nagai, Osamu Wakabayashi, Takashi Matsunaga, Kouji Kakizaki, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 6924, 69242S (2008) https://doi.org/10.1117/12.778430
KEYWORDS: Light sources, Double patterning technology, High power lasers, Laser stabilization, Power supplies, Laser applications, Oscillators, Error analysis, Excimer lasers, Laser development

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69242R (2008) https://doi.org/10.1117/12.778149
KEYWORDS: Semiconducting wafers, Reliability, Immersion lithography, Light sources, Laser stabilization, Metrology, High power lasers, Spectroscopy, Laser development, Laser applications

Proceedings Article | 27 March 2007 Paper
Proceedings Volume 6520, 652031 (2007) https://doi.org/10.1117/12.711258
KEYWORDS: Molybdenum, High power lasers, Laser systems engineering, Laser applications, Light sources, Systems modeling, Semiconductors, Lithography, Electrodes, Pulsed laser operation

Proceedings Article | 26 March 2007 Paper
Proceedings Volume 6520, 652024 (2007) https://doi.org/10.1117/12.711366
KEYWORDS: Light sources, Spectroscopy, Immersion lithography, Optical proximity correction, Excimer lasers, Lithography, Scanners, Laser applications, Laser development, Critical dimension metrology

Proceedings Article | 15 March 2006 Paper
Satoshi Tanaka, Hiroaki Tsushima, Takanori Nakaike, Taku Yamazaki, Takashi Saito, Hitoshi Tomaru, Koji Kakizaki, Takashi Matsunaga, Toru Suzuki, Osamu Wakabayashi, Shinji Nagai, Junichi Fujimoto, Toyoharu Inoue, Hakaru Mizoguchi
Proceedings Volume 6154, 61542O (2006) https://doi.org/10.1117/12.655474
KEYWORDS: Amplifiers, Excimer lasers, Light sources, Lithography, Magnetism, Resonators, Gas lasers, Reliability, Electrodes, Optical components

Proceedings Article | 14 September 2001 Paper
Kouji Kakizaki, Takashi Matsunaga, Yoichi Sasaki, Toyoharu Inoue, Satoshi Tanaka, Akifumi Tada, Hiroaki Taniguchi, Motohiro Arai, Tatsushi Igarashi
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435656
KEYWORDS: Excimer lasers, Argon, Lithography, Electrodes, Pulsed laser operation, Laser development, Laser stabilization, Gas lasers, Laser scanners, 3D scanning

Proceedings Article | 14 September 2001 Paper
Takashi Matsunaga, Tatsuo Enami, Kouji Kakizaki, Takashi Saito, Satoshi Tanaka, Hiroaki Nakarai, Toyoharu Inoue, Tatsushi Igarashi
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435703
KEYWORDS: Excimer lasers, Electrodes, Laser scanners, Lithography, 3D scanning, Chromium, Laser development, Pulsed laser operation, Light sources, Molecules

Showing 5 of 18 publications
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