Dr. Takashi Onose Profile

Dr. Takashi Onose

Chief Engineering Manager at Gigaphoton Inc

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Author

Publications (5)

Proceedings Article | 2 March 2020 Paper

High peak power DUV laser processing

Yasuhiro Kamba, Hironori Igarashi, Takashi Onose, Taisuke Miura, Ryoichi Nohdomi, Hiroaki Oizumi, Yoshihiko Murakami, Atsushi Fuchimukai, Chen Qu, Yuki Tamaru, Yohei Tanaka, Yuujirou Sasaki, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 11273, 112730L (2020) https://doi.org/10.1117/12.2549826

KEYWORDS: Excimer lasers, Deep ultraviolet, Laser processing, Pulsed laser operation, Picosecond phenomena, Laser drilling, Semiconductors, Lithography, Fiber lasers, Light sources

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Proceedings Article | 25 March 2019 Presentation + Paper

Microprocessing of organic material for semiconductor packaging by 248 nm excimer laser

Akira Suwa, Junichi Fujimoto, Yasufumi Kawasuji, Masakazu Kobayashi, Masashi Shimbori, Takashi Onose, Masaki Arakawa, Akira Mizutani, Hakaru Mizoguchi

Proceedings Volume 10906, 1090609 (2019) https://doi.org/10.1117/12.2510951

KEYWORDS: Excimer lasers, Organic materials, Scanning electron microscopy, Semiconductors, Packaging, Deep ultraviolet, Organic semiconductors, Semiconductor materials, Materials processing, Laser processing

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Proceedings Article | 16 March 2016 Paper

Development of high coherence high power 193nm laser

Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai, Yoichi Sasaki, Takashi Onose, Yasuhiro Kamba, Hironori Igarashi, Chen Qu, Mitsuru Tamiya, Hiroaki Oizumi, Shinji Ito, Koji Kakizaki, Hongwen Xuan, Zhigang Zhao, Yohei Kobayashi, Hakaru Mizoguchi

Proceedings Volume 9726, 972624 (2016) https://doi.org/10.1117/12.2211210

KEYWORDS: Solid state lasers, Excimer lasers, Laser systems engineering, Deep ultraviolet, Optical amplifiers, Amplifiers, Crystals, High power lasers, Semiconducting wafers, Fiber amplifiers

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Proceedings Article | 20 February 2015 Paper

Development of high coherence, 200mW, 193nm solid-state laser at 6 kHz

T. Nakazato, M. Tsuboi, T. Onose, Y. Tanaka, N. Sarukura, S. Ito, K. Kakizaki, S. Watanabe

Proceedings Volume 9342, 93420P (2015) https://doi.org/10.1117/12.2078601

KEYWORDS: Amplifiers, Crystals, Oscillators, Mirrors, Solid state lasers, Sapphire lasers, Laser systems engineering, Thermal effects, Nonlinear crystals, Laser development

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Proceedings Article | 10 March 2010 Paper

Flexible and reliable high power injection locked laser for double exposure and double patterning ArF immersion lithography

Masaya Yoshino, Hiroshi Umeda, Hiroaki Tsushima, Hidenori Watanabe, Satoshi Tanaka, Shinich Matsumoto, Takashi Onose, Hiroyuki Nogawa, Yasufumi Kawasuji, Takashi Matsunaga, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 7640, 76402A (2010) https://doi.org/10.1117/12.846337

KEYWORDS: Reliability, Double patterning technology, Excimer lasers, High power lasers, Immersion lithography, Lithography, Pulsed laser operation, Laser stabilization, Laser applications, Laser development

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