Dr. Sergei V. Govorkov Profile

Dr. Sergei V. Govorkov

Principal Development Engineer at Coherent, Inc.

SPIE Involvement:

Author

Publications (25)

Proceedings Article | 13 March 2019 Presentation

High power 808nm to 1060nm CW and QCW laser diode bars (Conference Presentation)

Guoli Liu, Sami Lehkonen, Zuntu Xu, Jingwei Li, Heiko Winhold, Sergei Govorkov, Heiko Kissel, Jens Biesenbach

Proceedings Volume 10900, 109000B (2019) https://doi.org/10.1117/12.2523782

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Proceedings Article | 27 September 2012 Paper

Towards a practical sodium guide star laser source: design for > 50 watt LGS based on OPSL

J. Berger, J. L. Chilla, S. Govorkov, J. F. van Nunen, A. Lepert

Proceedings Volume 8447, 84470G (2012) https://doi.org/10.1117/12.927846

KEYWORDS: Semiconductor lasers, Continuous wave operation, Semiconductors, Fiber lasers, Laser development, Quantum wells, Resonators, Mirrors, Optical pumping, Laser sources

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Proceedings Article | 15 February 2012 Paper

20 Watt CW TEM00 intracavity doubled optically pumped semiconductor laser at 532 nm

Jill Berger, Douglas Anthon, Andrea Caprara, Juan Chilla, Sergei Govorkov, Arnaud Lepert, Wayne Mefferd, Qi-Ze Shu, Luis Spinelli

Proceedings Volume 8242, 824206 (2012) https://doi.org/10.1117/12.907511

KEYWORDS: Semiconductor lasers, Continuous wave operation, Resonators, Semiconductors, Optical pumping, Mirrors, Laser packaging, Optical semiconductors, High power lasers, Laser applications

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Proceedings Article | 10 April 2005 Paper

Blue and green optically pumped semiconductor lasers for display

Juan Chilla, Hailong Zhou, Eli Weiss, Andrea Caprara, Qi-Ze Shou, Sergei Govorkov, Murray Reed, Luis Spinelli

Proceedings Volume 5740, (2005) https://doi.org/10.1117/12.598301

KEYWORDS: Semiconductor lasers, Lamps, RGB color model, Laser applications, Light sources, Diodes, Prototyping, Modulation, Fiber lasers, Laser marking

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Proceedings Article | 28 May 2004 Paper

Sub-0.25-pm 50-W amplified excimer laser system for 193-nm lithography

Sergei Govorkov, Alexander Wiessner, Gongxue Hua, Timur Misuryaev, Andrey Knysh, Stefan Spratte, Peter Lokai, Tamas Nagy, Igor Bragin, Andreas Targsdorf, Thomas Schroeder, Hans-Stephan Albrecht, Rainer Desor, Thomas Schmidt, Rainer Paetzel

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536374

KEYWORDS: Oscillators, Optical amplifiers, Excimer lasers, Laser systems engineering, Lithography, Molybdenum, Amplifiers, Optical lithography, Optics manufacturing, Pulsed laser operation

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Proceedings Article | 10 November 2003 Paper

F2-laser systems prepared for advanced applications at 157 nm

R. Delmdahl, K. Mannel, S. Spratte, U. Rebhan, S. Govorkov, K. Vogler, I. Bragin

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515515

KEYWORDS: Fluorine, Quartz, Laser applications, Optical lithography, Lithography, Polymers, Excimer lasers, Silica, Micromachining, Telecommunications

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Proceedings Article | 26 June 2003 Paper

High-power excimer lasers for 157-nm lithography

Stefan Spratte, Frank Voss, Igor Bragin, Elko Bergmann, Norbert Niemoeller, Tamas Nagy, Ulrich Rebhan, Andreas Targsdorf, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485345

KEYWORDS: Lithography, Pulsed laser operation, Laser stabilization, High power lasers, Reliability, Laser development, Excimer lasers, Laser resonators, Optical lithography, Laser optics

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Proceedings Article | 17 June 2003 Paper

High-peak power solid state laser for micromachining of hard materials

Ludolf Herbst, John Quitter, Gregory Ray, Thomas Kuntze, Alexander Wiessner, Sergei Govorkov, Mike Heglin

Proceedings Volume 4968, (2003) https://doi.org/10.1117/12.478958

KEYWORDS: Silicon, Micromachining, Diode pumped solid state lasers, Diamond, Laser drilling, Solid state lasers, Manufacturing, Nd:YAG lasers, Head, Pulsed laser operation

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Proceedings Article | 15 April 2003 Paper

Excimer laser application: writing of fiber Bragg gratings

Ludolf Herbst, Sergei Govorkov

Proceedings Volume 4941, (2003) https://doi.org/10.1117/12.468392

KEYWORDS: Excimer lasers, Fiber Bragg gratings, Ultraviolet radiation, Resonators, Manufacturing, Laser sources, Spatial coherence, Continuous wave operation, Optics manufacturing, Laser development

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Proceedings Article | 30 July 2002 Paper

High-power high-repetition-rate F2 lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Stefan Spratte, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474614

KEYWORDS: Lithography, Laser stabilization, Prototyping, Pulsed laser operation, Vacuum ultraviolet, High power lasers, Laser development, Spatial coherence, Laser metrology, Polarization

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Proceedings Article | 18 June 2002 Paper

Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

Michael Heglin, Sergei Govorkov, Michael Scaggs, Haris Theoharidis, T. Schoelzel

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.470646

KEYWORDS: Pulsed laser operation, Plasma, Micromachining, Nd:YAG lasers, Silicon, Laser drilling, Diode pumped solid state lasers, Laser cutting, Lasers, Metals

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Proceedings Article | 30 May 2002 Paper

Microscopic imaging of semiconductor surfaces and interfaces

Vladislav Yakovlev, Katerina Mikhailichenko, Sergei Govorkov

Proceedings Volume 4749, (2002) https://doi.org/10.1117/12.468882

KEYWORDS: Semiconducting wafers, Crystals, Luminescence, Anisotropy, Silicon, Confocal microscopy, Microscopes, Objectives, Signal detection, Semiconductors

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Proceedings Article | 14 September 2001 Paper

Advanced F2-lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435652

KEYWORDS: Calibration, Lithography, Laser stabilization, Spectroscopy, Vacuum ultraviolet, Pulsed laser operation, Laser metrology, Laser scanners, 3D scanning, Gas lasers

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Proceedings Article | 29 May 2001 Paper

Novel techniques for microscopic imaging of semiconductor surfaces

Vladislav Yakovlev, Katerina Mikhailichenko, Sergei Govorkov

Proceedings Volume 4276, (2001) https://doi.org/10.1117/12.428011

KEYWORDS: Crystals, Semiconducting wafers, Semiconductors, Confocal microscopy, Silicon, Nonlinear crystals, Diagnostics, Luminescence, Femtosecond phenomena, Signal detection

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Proceedings Article | 12 April 2001 Paper

Development and characterization of advanced F2 laser source for 157-nm lithography

Klaus Vogler, Frank Voss, Elko Bergmann, Uwe Stamm, Sergei Govorkov, Gongxue Hua, Wojciech Walecki

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425040

KEYWORDS: Lithography, Laser applications, Laser sources, Reliability, Laser components, Silver, Fourier transforms, Laser marking, Laser induced damage, Laser development

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Proceedings Article | 6 November 2000 Paper

Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Uwe Stamm, Michael Fiebig, Sergei Govorkov, Eric Mayer, Rustem Osmanov, Michael Scaggs, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405697

KEYWORDS: Excimer lasers, Laser development, Laser ablation, Microfabrication, Laser applications, Diode pumped solid state lasers, Nd:YAG lasers, Annealing, Pulsed laser operation, Fluorine

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Proceedings Article | 16 August 2000 Paper

High-throughput micromachining of steel and ceramics with solid state UV laser

Sergei Govorkov, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407399

KEYWORDS: Laser ablation, Plasma, Absorption, Ceramics, Titanium, Aluminum, Metals, Ultraviolet radiation, Laser drilling, Pulsed laser operation

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Proceedings Article | 5 July 2000 Paper

Advanced F2 lasers for microlithography

Klaus Vogler, Uwe Stamm, Igor Bragin, Frank Voss, Sergei Govorkov, Gongxue Hua, Juergen Kleinschmidt, Rainer Paetzel

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388991

KEYWORDS: Lithography, Laser stabilization, Sensors, Calibration, Metrology, Power meters, Pulsed laser operation, Laser resonators, Optical lithography, Laser metrology

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Proceedings Article | 7 June 2000 Paper

High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec

Sergei Govorkov, Evgueni Slobodtchikov, Alexander Wiessner, Dirk Basting

Proceedings Volume 3933, (2000) https://doi.org/10.1117/12.387592

KEYWORDS: Laser ablation, Plasma, Ultraviolet radiation, Laser drilling, Solid state lasers, Signal attenuation, Metals, Solid state physics, Nd:YAG lasers, Laser damage threshold

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Proceedings Article | 15 July 1999 Paper

Fiber Bragg grating writing by interferometric or phase mask methods using high-power excimer lasers

Eric Mayer, David Gillett, Sergei Govorkov

Proceedings Volume 3618, (1999) https://doi.org/10.1117/12.352679

KEYWORDS: Fiber Bragg gratings, Excimer lasers, Spatial coherence, Resonators, Interferometry, Temporal coherence, Shearing interferometers, Visibility, Phase interferometry, Spatial filters

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Proceedings Article | 25 June 1999 Paper

Excimer laser for 157-nm lithography

Uwe Stamm, Igor Bragin, Sergei Govorkov, Juergen Kleinschmidt, Rainer Paetzel, Evgueni Slobodtchikov, Klaus Vogler, Frank Vofl, Dirk Basting

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351152

KEYWORDS: Excimer lasers, Lithography, Laser resonators, Laser stabilization, Optical lithography, Deep ultraviolet, Laser applications, Vacuum ultraviolet, Resonators, Optical design

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Proceedings Article | 7 April 1999 Paper

DUV laser light sources (Abstract Only)

Sergei Govorkov, Robert Willard

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344437

KEYWORDS: Deep ultraviolet, Light sources, Excimer lasers, Optical lithography, Solid state lasers, High power lasers, Reliability, Laser development, Laser applications, Micromachining

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Proceedings Article | 3 June 1998 Paper

High-average-power Ce:LiCaF laser at 1-KHz repetition rate tunable from 280 nm to 315 nm

Sergei Govorkov, A. Wiebner, Peter Genter, Uwe Stamm, Wolfgang Zschocke, Thomas Schroeder, Dirk Basting

Proceedings Volume 3274, (1998) https://doi.org/10.1117/12.309494

KEYWORDS: Tunable lasers, Nd:YAG lasers, Ultraviolet radiation, Solid state lasers, Crystals, Semiconductor lasers, Diodes, Laser crystals, Pulsed laser operation, Laser systems engineering

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