Unspecified Ranga Reddy Profile

Ranga Reddy

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Small pitch overlay imaging metrology targets for tight OPO control

Nikhil Aditya Kumar Roy, Richard Housley, Suresh Kumar, Ranga Reddy, Dan Engelhard, Hao Wang, Atsushi Miyafuji, Toshiharu Nishiyama, Yoel Feler, Diana Shaphirov, Mark Ghinovker, Ido Ashuah, Yoav Grauer, Yonglei Li

Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769

KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years