Dr. Paolo Parisi Profile

Dr. Paolo Parisi

at KLA Italy Srl

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 20 March 2020 Paper

Photosensitive organic insulator photo-cell monitoring through advanced macro inspection

A. Corno, A. Bordogna, M. Braga, A. Pescalli, F. Ferrario, U. Iessi, P. Canestrari, P. Sharma, M. Salamone, P. Parisi, T. Groos

Proceedings Volume 11325, 113252K (2020) https://doi.org/10.1117/12.2551884

KEYWORDS: Inspection, Manufacturing, Optical lithography, Process control

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Proceedings Article | 20 March 2020 Paper

Novel post-lithography macro inspection strategies for advanced legacy fab challenges

A. Bordogna, S. Seminato, A. Corno, A. Beccalli, L. Motta, G. Pistone, F. Ferrario, P. Piacentini, B. Micali, P. Sharma, L. Bouckou, P. Parisi, T. Groos

Proceedings Volume 11325, 113250I (2020) https://doi.org/10.1117/12.2551890

KEYWORDS: Inspection, Lithography, Defect detection, Defect inspection, Manufacturing, Process control

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Proceedings Article | 28 March 2017 Paper

Connected component analysis of review-SEM images for sub-10nm node process verification

Sandip Halder, Philippe Leray, Kaushik Sah, Andrew Cross, Paolo Parisi

Proceedings Volume 10145, 101451Y (2017) https://doi.org/10.1117/12.2270492

KEYWORDS: Image processing, Image analysis, Scanning electron microscopy, Optical inspection, Extreme ultraviolet, Modulation, Photomasks, Deep ultraviolet, Semiconducting wafers, Defect inspection

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Proceedings Article | 19 March 2015 Paper

Accelerated technology development by the use of critical point imaging SEM

Dominique Sanchez, Benôit Hinschberger, Loemba Bouckou, Olivier Moreau, Paolo Parisi

Proceedings Volume 9424, 94242H (2015) https://doi.org/10.1117/12.2073889

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Microelectronics, Process control, Image processing, Semiconductor manufacturing, Imaging systems, Visualization, Defect inspection

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Proceedings Article | 19 March 2015 Paper

The use of eDR-71xx for DSA defect review and automated classification

Hari Pathangi, Dieter Van Den Heuvel, Hareen Bayana, Loemba Bouckou, Jim Brown, Paolo Parisi, Rohan Gosain

Proceedings Volume 9424, 94242F (2015) https://doi.org/10.1117/12.2085902

KEYWORDS: Image quality, Bridges, Defect inspection, Inspection, Semiconducting wafers, Scanning electron microscopy, Image classification, Metrology, Silicon, Directed self assembly

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Proceedings Article | 3 April 2012 Paper

Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography

Dieter Van den Heuvel, Rik Jonckheere, Bart Baudemprez, Shaunee Cheng, Gino Marcuccilli, Andrew Cross, Gregg Inderhees, Paolo Parisi

Proceedings Volume 8324, 83240L (2012) https://doi.org/10.1117/12.916979

KEYWORDS: Inspection, Semiconducting wafers, Reticles, Wafer inspection, Photomasks, Etching, Wafer-level optics, Scanning electron microscopy, Defect detection, Defect inspection

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Proceedings Article | 14 December 2009 Paper

Immersion and dry lithography monitoring for flash memories (after develop inspection and photo cell monitor) using a darkfield imaging inspector with advanced binning technology

P. Parisi, A. Mani, C. Perry-Sullivan, J. Kopp, G. Simpson, M. Renis, M. Padovani, C. Severgnini, P. Piacentini, P. Piazza, A. Beccalli

Proceedings Volume 7520, 75201W (2009) https://doi.org/10.1117/12.835839

KEYWORDS: Inspection, Semiconducting wafers, Phase modulation, Critical dimension metrology, Immersion lithography, Lithography, Defect detection, Scanners, Defect inspection, Imaging systems

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Showing 5 of 7 publications

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