Dr. Matthias F. Koch
at Merck KGaA
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 April 2024 Poster + Paper
M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner
Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843
KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography

Proceedings Article | 1 May 2023 Poster + Paper
F. Meyer, M. Koch, K. Nishikawa, G. Larbig, K. Taniguchi
Proceedings Volume 12498, 124981R (2023) https://doi.org/10.1117/12.2658391
KEYWORDS: Polymers, Polymer thin films, Dielectrics, Semiconducting wafers, Shrinkage, Ultraviolet radiation, Coating stress, Thermal stability

Proceedings Article | 1 May 2023 Presentation + Paper
Matthias Koch, Maria Russew, L. Scharfenberg, Andreas Benker, Arne Schleunitz, Gabi Grützner
Proceedings Volume 12497, 124970M (2023) https://doi.org/10.1117/12.2658408
KEYWORDS: Polymers, Optical lithography, Ultraviolet radiation, Lithography, Passivation, Advanced patterning, Transparency

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