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Dr. Jaehoon Kim
at Seoul National Univ
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Publications (1)
Proceedings Article | 10 April 2024 Poster
Layout to SEM: hotspot prediction via SEM image synthesis
Jaehoon Kim, Jaekyung Lim, Tae-Yeon Kim, Yunhyoung Nam, Do-Nyun Kim
Proceedings Volume 12955, 1295528 (2024) https://doi.org/10.1117/12.3009864
KEYWORDS: Scanning electron microscopy, Semiconductors, Manufacturing, Industry, Transistors, Process modeling, Performance modeling, Data modeling, Reliability, Lithography
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