Prof. Do-Nyun Kim
at Seoul National Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Poster
Yunhyoung Nam, Do-Nyun Kim
Proceedings Volume 12955, 129552R (2024) https://doi.org/10.1117/12.3010395
KEYWORDS: Scanning electron microscopy, Optical alignment, Lithography, Image quality, Computer aided design, Inspection, Semiconductors, Industry, Gallium nitride, Electron microscopes

Proceedings Article | 10 April 2024 Poster
Jaehoon Kim, Jaekyung Lim, Tae-Yeon Kim, Yunhyoung Nam, Do-Nyun Kim
Proceedings Volume 12955, 1295528 (2024) https://doi.org/10.1117/12.3009864
KEYWORDS: Scanning electron microscopy, Semiconductors, Manufacturing, Industry, Transistors, Process modeling, Performance modeling, Data modeling, Reliability, Lithography

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