Dr. Huirong Yao
Senior Research Chemist at EMD Electronics
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 7 April 2017 Paper
G. Mannaert, E. Altamirano-Sanchez, T. Hopf, F. Sebaai, C. Lorant, C. Petermann, S.-E. Hong, S. Mullen, E. Wolfer, D. Mckenzie, H. Yao, D. Rahman, J.-Y. Cho, M. Padmanaban, D. Piumi
Proceedings Volume 10149, 101490T (2017) https://doi.org/10.1117/12.2264323
KEYWORDS: Etching, Metals, Optical lithography, Photomasks, Plasma, System on a chip, Oxides, Contamination, Reflectivity, Silicon

Proceedings Article | 25 March 2016 Paper
Huirong Yao, Salem Mullen, Elizabeth Wolfer, Douglas McKenzie, Dalil Rahman, JoonYeon Cho, Munirathna Padmanaban, Claire Petermann, SungEun Hong, YoungJun Her
Proceedings Volume 9779, 97791O (2016) https://doi.org/10.1117/12.2220293
KEYWORDS: Resistance, Oxygen, Silicon, Semiconducting wafers

Proceedings Article | 20 March 2015 Paper
Huirong Yao, Alberto Dioses, Salem Mullen, Elizabeth Wolfer, Douglas McKenzie, Dalil Rahman, JoonYeon Cho, Munirathna Padmanaban, Claire Petermann, YoungJun Her, Yi Cao
Proceedings Volume 9425, 942518 (2015) https://doi.org/10.1117/12.2085811
KEYWORDS: Metals, Etching, Oxides, Photomasks, Dielectrics, Resistance, Semiconducting wafers, Coating, Silicon, Plasma etching

Proceedings Article | 27 March 2014 Paper
Alberto Dioses, Venkata Chada, Elizabeth Wolfer, Edward Ng, Salem Mullen, Huirong Yao, JoonYeon Cho, Munirathna Padmanaban
Proceedings Volume 9051, 90512B (2014) https://doi.org/10.1117/12.2046676
KEYWORDS: Etching, Resistance, Metals, Chemical vapor deposition, Semiconducting wafers, Silicon, Wet etching, Atomic layer deposition, Oxides, Semiconductor manufacturing

Proceedings Article | 27 March 2014 Paper
Jin Li, Ide Yasuaki, Shigemasa Nakasugi, Motoki Misumi, Hiroshi Yanagita, Fumihiro Suzuki, Georg Pawlowski, JoonYeon Cho, Huirong Yao, Takanori Kudo, Munirathna Padmanaban, YoungJun Her, Yi Cao
Proceedings Volume 9051, 905117 (2014) https://doi.org/10.1117/12.2046237
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photons, Electrons, Optical lithography, Lithography, Printing, Polymers, Photomasks, Absorbance

Showing 5 of 11 publications
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