CONFERENCE PROCEEDINGS
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Howard Chen
at Micron Technology Taiwan Inc
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 2 April 2010 Paper
Overlay control strategy for 45/32nm RD and production ramp up
Tuan-Yen Yu, Jun-Hung Lin, Yong-Fa Huang, Chien-Hao Chen, Chun-Chi Yu, Chin-Chou Kevin Huang, Chien-Jen Huang, David Tien
Proceedings Volume 7638, 76382K (2010) https://doi.org/10.1117/12.846569
KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Phase modulation, Control systems, Metrology, Process control, Mathematical modeling, Dynamical systems, Optical alignment
Proceedings Article | 1 April 2009 Paper
KrF resists and process for implant layers at advanced nodes
Hung-Chin Huang, Yong-Fa Huang, Steven Wu, Louis Jang, Sho-Shen Lee, George K. Huang, Howard Chen, Chun-Chi Yu, Tomoki Kurihara, Hitoshi Fukiya, Hiromu Yoshida, Yoshihiro Yamamoto
Proceedings Volume 7273, 72730M (2009) https://doi.org/10.1117/12.816136
KEYWORDS: Transmittance, Semiconducting wafers, Lithography, Silicon, Antireflective coatings, Ions, Photoresist processing, Reflectivity, Scanning electron microscopy, Silicon films
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