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Louis Jang
at United Microelectronics Corp
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Author
Publications (3)
Proceedings Article | 20 April 2011 Paper
High-order stitching overlay analysis for advanced process control
Y. Pai, Charlie Chen, Louis Jang, Howard Chen, Chun-Chi Yu, Chin-Chou Huang, Hsing-Chien Wu, John Robinson, David Tien
Proceedings Volume 7971, 797127 (2011) https://doi.org/10.1117/12.879360
KEYWORDS: Overlay metrology, Data modeling, Semiconducting wafers, Process control, Metrology, Scanners, Optical lithography, Statistical modeling, Statistical analysis, Distortion
Proceedings Article | 1 April 2009 Paper
KrF resists and process for implant layers at advanced nodes
Hung-Chin Huang, Yong-Fa Huang, Steven Wu, Louis Jang, Sho-Shen Lee, George K. Huang, Howard Chen, Chun-Chi Yu, Tomoki Kurihara, Hitoshi Fukiya, Hiromu Yoshida, Yoshihiro Yamamoto
Proceedings Volume 7273, 72730M (2009) https://doi.org/10.1117/12.816136
KEYWORDS: Transmittance, Semiconducting wafers, Lithography, Silicon, Antireflective coatings, Ions, Photoresist processing, Reflectivity, Scanning electron microscopy, Silicon films
Proceedings Article | 12 March 2008 Paper
Effects of laser bandwidth on tool to tool CD matching
Bo-Yun Hsueh, Hung-Yi Wu, Louis Jang, Met Yeh, Chen-Chin Yang, George K.C. Huang, Chun-Chi Yu, Allen Chang
Proceedings Volume 6924, 69244K (2008) https://doi.org/10.1117/12.773567
KEYWORDS: Critical dimension metrology, Lithography, Semiconducting wafers, Imaging systems, Laser scanners, 3D scanning, Laser stabilization, Tunable lasers, Spectroscopy, Coherence (optics)
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