Dr. Haodong Qiu
at Onto Innovation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524
KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960F (2023) https://doi.org/10.1117/12.2658148
KEYWORDS: Education and training, Semiconducting wafers, Overlay metrology, Critical dimension metrology, Mueller matrices, 3D metrology, Data modeling, 3D modeling, Machine learning, Spectral response

Proceedings Article | 22 February 2018 Paper
Callum Littlejohns, Milos Nedeljkovic, Wei Cao, Jordi Soler Penades, David Hagan, Jason Ackert, Mohamed Saïd Rouifed, Wanjun Wang, Zecen Zhang, Haodong Qiu, Tina Guo Xin, Andrew Knights, Graham Reed, Goran Mashanovich, Hong Wang, David Thomson
Proceedings Volume 10538, 105380Y (2018) https://doi.org/10.1117/12.2288951
KEYWORDS: Silicon, Absorption, Modulation, Refractive index, Photodetectors, Modulators, Waveguides, Sensors, Phase shifts, Silicon photonics

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