Dr. Haodong Qiu Profile

Dr. Haodong Qiu

at Onto Innovation Inc

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

Advanced FTIR optical modeling for hydrogen content measurements in 3D NAND cell nitride and amorphous carbon hard mask

Joshua Frederick, Youcheng Wang, Haodong Qiu, Eui Sang Song, Sadao Takabayashi, Izaak Williamson, Ryan Lucas, Zhuo Chen, Peter Wang, Benoit Revot, Hao Wang, Dan Engelhard

Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524

KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis

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Proceedings Article | 27 April 2023 Presentation + Paper

Characterization of asymmetries in 3D NAND memory devices

Jie Li, Shashank Srivastava, Joyce Li, Zhuo Chen, Petar Žuvela, Boyang Chor, Jinyu Deng, Haodong Qiu, YaChing Chang, Sadao Takabayashi, Xadric Yiew, Bo Hui Ng, Rohit Kothari, Dan Engelhard, Han Yang Tan

Proceedings Volume 12496, 124960F (2023) https://doi.org/10.1117/12.2658148

KEYWORDS: Education and training, Semiconducting wafers, Overlay metrology, Critical dimension metrology, Mueller matrices, 3D metrology, Data modeling, 3D modeling, Machine learning, Spectral response

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Proceedings Article | 22 February 2018 Paper

All silicon approach to modulation and detection at λ = 2 µm

Callum Littlejohns, Milos Nedeljkovic, Wei Cao, Jordi Soler Penades, David Hagan, Jason Ackert, Mohamed Saïd Rouifed, Wanjun Wang, Zecen Zhang, Haodong Qiu, Tina Guo Xin, Andrew Knights, Graham Reed, Goran Mashanovich, Hong Wang, David Thomson

Proceedings Volume 10538, 105380Y (2018) https://doi.org/10.1117/12.2288951

KEYWORDS: Silicon, Absorption, Modulation, Refractive index, Photodetectors, Modulators, Waveguides, Sensors, Phase shifts, Silicon photonics

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