Dr. Ryan Lucas
at Micron Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524
KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis

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