Alexandre Derville
VP of Research at POLLEN Metrology
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 25 March 2019 Presentation + Paper
Proceedings Volume 10960, 109600Z (2019) https://doi.org/10.1117/12.2514955
KEYWORDS: Machine learning, Image processing, Data modeling, Process engineering, Data analysis, Image analysis, Process modeling, Line edge roughness, Metrology, Engineering education

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10963, 109630C (2019) https://doi.org/10.1117/12.2514705
KEYWORDS: Machine learning, Databases, Image processing, Plasma etching, Process engineering, Data analysis, Image analysis, Transmission electron microscopy, Scanning electron microscopy, Semiconductors

Proceedings Article | 19 March 2018 Presentation + Paper
Proceedings Volume 10586, 105860Z (2018) https://doi.org/10.1117/12.2297347
KEYWORDS: Machine learning, Image processing, Neural networks, Line edge roughness, Image analysis, Line width roughness, Critical dimension metrology, Image enhancement, Detection and tracking algorithms, Metrology

Proceedings Article | 16 March 2018 Paper
Proceedings Volume 10585, 105852R (2018) https://doi.org/10.1117/12.2297348
KEYWORDS: Machine learning, Image processing, Cognitive modeling, Data modeling, Image filtering, Databases, Detection and tracking algorithms, Metrology, Inspection, Image segmentation

Proceedings Article | 28 April 2017 Presentation
Johann Foucher, Aurelien Labrosse, Alexandre Dervillé, Yann Zimmermann, Guilhem Bernard, Sergio Martinez, Hanna Grönqvist, Julien Baderot, Florian Pinzan
Proceedings Volume 10145, 1014507 (2017) https://doi.org/10.1117/12.2258093
KEYWORDS: Metrology, Data fusion, Process control, Atmospheric modeling, Nanotechnology, Chemistry, Semiconductors, Process modeling, Crystals, Industrial chemicals

Showing 5 of 9 publications
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