Designed tools for analysis of lithography patterns and nanostructures

Alexandre Dervillé; Julien Baderot; Guilhem Bernard; Johann Foucher; Hanna Grönqvist; Aurélien Labrosse; Sergio Martinez; Yann Zimmermann

doi:10.1117/12.2258612

28 March 2017 Designed tools for analysis of lithography patterns and nanostructures

Alexandre Dervillé, Julien Baderot, Guilhem Bernard, Johann Foucher, Hanna Grönqvist, Aurélien Labrosse, Sergio Martinez, Yann Zimmermann

Author Affiliations +

Proceedings Volume 10145, Metrology, Inspection, and Process Control for Microlithography XXXI; 101450I (2017) https://doi.org/10.1117/12.2258612
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

We introduce a set of designed tools for the analysis of lithography patterns and nano structures. The classical metrological analysis of these objects has the drawbacks of being time consuming, requiring manual tuning and lacking robustness and user friendliness. With the goal of improving the current situation, we propose new image processing tools at different levels: semi automatic, automatic and machine-learning enhanced tools. The complete set of tools has been integrated into a software platform designed to transform the lab into a virtual fab. The underlying idea is to master nano processes at the research and development level by accelerating the access to knowledge and hence speed up the implementation in product lines.

Conference Presentation

Citation Download Citation

Alexandre Dervillé, Julien Baderot, Guilhem Bernard, Johann Foucher, Hanna Grönqvist, Aurélien Labrosse, Sergio Martinez, and Yann Zimmermann "Designed tools for analysis of lithography patterns and nanostructures", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450I (28 March 2017); https://doi.org/10.1117/12.2258612

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available