Dr. Guillaume Gey Profile

Dr. Guillaume Gey

at POLLEN Metrology

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Publications (2)

Proceedings Article | 25 March 2019 Presentation + Paper

Accelerate the analysis and optimization of lamellar BCP process using machine learning

A. Derville, S. Martinez, G. Gey, J. Baderot, G. Bernard, X. Chevalier, J. Foucher

Proceedings Volume 10960, 109600Z (2019) https://doi.org/10.1117/12.2514955

KEYWORDS: Machine learning, Image processing, Data modeling, Process engineering, Data analysis, Image analysis, Process modeling, Line edge roughness, Metrology, Engineering education

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Proceedings Article | 20 March 2019 Presentation + Paper

Using machine learning technology to accelerate the development of plasma etching processes

A. Derville, G. Gey, J. Baderot, S. Martinez, G. Bernard, J. Foucher

Proceedings Volume 10963, 109630C (2019) https://doi.org/10.1117/12.2514705

KEYWORDS: Machine learning, Databases, Image processing, Plasma etching, Process engineering, Data analysis, Image analysis, Transmission electron microscopy, Scanning electron microscopy, Semiconductors

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