Paper
26 September 2013 Emission properties of surface patterned LEDs
Dusan Pudis, Pavol Hronec, Jaroslav Kovac, Ivana Lettrichova, Jaroslava Skriniarova, Daniel Jandura, Sofia Slabeyciusova, Lubos Suslik, Jozef Novak, Anton Kuzma
Author Affiliations +
Abstract
Implementation of planar surface structures allows enhancement of light extraction from the light emitting diode (LED) surface due to diffraction-on-roughness based effect and photonic-band gap effect. Application of such structures can be attractive for overall and local enhancement of light from patterned areas of the LED surface. We used interference and near-field scanning optical microscope lithography for patterning of the surface of GaAs/AlGaAs based LEDs emitted at 840 nm. Also new approach with patterned polydimethylsiloxane (PDMS) membrane applied directly in the LED surface was investigated. Technology of patterned PDMS membranes using interference lithography and imprinting process was developed. The overall emission properties of prepared LED with patterned structure show enhanced light extraction efficiency, what was documented from near- and far-field measurements.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dusan Pudis, Pavol Hronec, Jaroslav Kovac, Ivana Lettrichova, Jaroslava Skriniarova, Daniel Jandura, Sofia Slabeyciusova, Lubos Suslik, Jozef Novak, and Anton Kuzma "Emission properties of surface patterned LEDs", Proc. SPIE 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X, 88161A (26 September 2013); https://doi.org/10.1117/12.2023710
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Light emitting diodes

Lithography

Near field scanning optical microscopy

Photoresist materials

Optical lithography

Photonics

Near field

Back to Top