Near-field detection of the quality of high-density gratings with nanotechnology

Peng Xi; Changhe Zhou; Hongxin Luo; Enwen Dai; Liren Liu

doi:10.1117/12.503994

20 October 2003 Near-field detection of the quality of high-density gratings with nanotechnology

Peng Xi, Changhe Zhou, Hongxin Luo, Enwen Dai, Liren Liu

Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.503994
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The high-density grating is routinely used in spectral expansion of optical information processing system. But usually it is hard to examine such gratings directly. The well-used Moire interferential pattern method can only obtain the overall coarse result. While in practice,the local quality of a grating is highly interesting. In this paper we use a nano-probe fiber to scan the near field of a grating. With the Talbot effect of a grating,we can take a picture of 5 x 5 square-micron area for analyzing the local quality. In our experimental setup,the Talbot image of a grating is coupled into a fiber detector with the fiber tip of 50 nanometers. With the Talbot effect, the surface profiles of the gratings are detected. Three gratings are examined in our experiment with the line widths of 600 lines per millimeter for all gratings. From the experimental results we can see that a well made grating can yield a sharp image at the Talbot distance. Experimental results demonstrate that this nanotechnology-based Talbot detection method can be widely applied in grating examination.

Citation Download Citation

Peng Xi, Changhe Zhou, Hongxin Luo, Enwen Dai, and Liren Liu "Near-field detection of the quality of high-density gratings with nanotechnology", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.503994

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