Extending immersion lithography down to 1x nm production nodes

Wim P. de Boeij; Remi Pieternella; Igor Bouchoms; Martijn Leenders; Marjan Hoofman; Roelof de Graaf; Haico Kok; Par Broman; Joost Smits; Jan-Jaap Kuit; Matthew McLaren

doi:10.1117/12.2021397

12 April 2013 Extending immersion lithography down to 1x nm production nodes

Wim P. de Boeij, Remi Pieternella, Igor Bouchoms, Martijn Leenders, Marjan Hoofman, Roelof de Graaf, Haico Kok, Par Broman, Joost Smits, Jan-Jaap Kuit, Matthew McLaren

Author Affiliations +

Proceedings Volume 8683, Optical Microlithography XXVI; 86831L (2013) https://doi.org/10.1117/12.2021397
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In this paper we report on the performance enhancements on the NXT immersion scanner platform to support the immersion lithography roadmap. We particular discuss scanner modules that enable future overlay and focus requirements. Among others we describe the improvements in grid calibrations and grid matching; thermal control of reticle heating with dynamic systems adjustments; aberration tuning and FlexWave-lens heating control as well as aberration- and overlay-metrology on wafer-2-wafer timescales. Finally we address reduction of leveling process dependencies, stage servo dynamics and wafer table flatness to enhance on-product focus and leveling performance. We present and discuss module- and system-data of the above mentioned scanner improvements.

Citation Download Citation

Wim P. de Boeij, Remi Pieternella, Igor Bouchoms, Martijn Leenders, Marjan Hoofman, Roelof de Graaf, Haico Kok, Par Broman, Joost Smits, Jan-Jaap Kuit, and Matthew McLaren "Extending immersion lithography down to 1x nm production nodes", Proc. SPIE 8683, Optical Microlithography XXVI, 86831L (12 April 2013); https://doi.org/10.1117/12.2021397

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available