Dr. Mark Kellam Profile

Dr. Mark Kellam

at Rambus

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 15 February 1994 Paper

Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS

Badih El-Kareh, Ashwin Ghatalia, Mark Kellam, Philippe Maillot, Carlton Osburn, Xiaoqiang Zhang

Proceedings Volume 2091, (1994) https://doi.org/10.1117/12.167352

KEYWORDS: Oxides, Boron, Field effect transistors, Semiconducting wafers, Silicon, Phosphorus, Transmission electron microscopy, Diffusion, Arsenic, Oxidation

Read Abstract +

Proceedings Article | 1 July 1991 Paper

Characterization of wavelength offset for optimization of deep-UV stepper performance

Susan Jones, Bruce Dudley, Charles Peters, Mark Kellam, Edward Pavelchek

Proceedings Volume 1464, (1991) https://doi.org/10.1117/12.44465

KEYWORDS: Metrology, Monochromatic aberrations, Distortion, Scanning electron microscopy, Semiconducting wafers, Inspection, Photomasks, Resistance, Integrated circuits, Process control

Read Abstract +

Proceedings Article | 1 January 1990 Paper

Yield enhancement through identifying design sensitivities

Bei Tseng Chu, Mark Kellam

Proceedings Volume 1293, (1990) https://doi.org/10.1117/12.21150

KEYWORDS: Artificial intelligence, Very large scale integration, Computer simulations, Device simulation, Failure analysis, Microelectronics, Transistors, Pattern recognition, Semiconducting wafers, Process modeling

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years