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Jiang Hu
at Xi'an Technological Univ
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Author
Publications (2)
Proceedings Article | 19 February 2015 Paper
Research on deep silicon etching for micro-channel plates
Shun Zhou, Jiang Hu, Yufeng Zhu, Jing Nie, Jiaqiang Du
Proceedings Volume 9449, 94493V (2015) https://doi.org/10.1117/12.2083294
KEYWORDS: Etching, Silicon, Reactive ion etching, Cryogenics, Anisotropic etching, Oxygen, Deep reactive ion etching, Scanning electron microscopy, Image processing, Microelectromechanical systems
Proceedings Article | 19 February 2015 Paper
Study of high aspect ratio silicon etching based on ICP
Jiang Hu, Shun Zhou, Shuai Hu, Yufeng Zhu, Weiguo Liu
Proceedings Volume 9449, 94493P (2015) https://doi.org/10.1117/12.2082855
KEYWORDS: Etching, Silicon, Anisotropic etching, Silica, Polymers, Plasma, Wet etching, Polymer thin films, Deposition processes, Microelectromechanical systems
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