Mr. Zhiyong Yang Profile

Zhiyong Yang

at Shanghai Micro Electronics Equipment Co Ltd

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Publications (6)

Proceedings Article | 23 March 2020 Paper

Fast algorithm of the scanning lithographic metrics based on a quadratic imaging model and an integral transfer function

Zhiyong Yang, Xiuguo Chen, Yating Shi, Hao Jiang, Shiyuan Liu

Proceedings Volume 11327, 1132719 (2020) https://doi.org/10.1117/12.2552187

KEYWORDS: Lithography, Nanoimprint lithography, Turbulence, Principal component analysis, Wavefront aberrations, Coherence imaging, Imaging systems, Image processing, Photomasks, Image quality

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Proceedings Article | 20 March 2019 Paper

Modeling of dynamic image performance for lithographic projection lens

Zhiyong Yang, Yating Shi, Hao Jiang, Shiyuan Liu

Proceedings Volume 10961, 109610V (2019) https://doi.org/10.1117/12.2515342

KEYWORDS: Lithography, Image quality, Semiconducting wafers, Nanoimprint lithography, Image processing, Artificial intelligence, Process modeling, Performance modeling, Optical components, Reticles

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Proceedings Article | 13 March 2012 Paper

Lithographic tool dynamic coordinate calibration for CDU improvement

Zhiyong Yang, Fanglin Mao, Anatoly Bourov, Jianrui Cheng, Le He

Proceedings Volume 8326, 83262G (2012) https://doi.org/10.1117/12.915975

KEYWORDS: Semiconducting wafers, Image processing, Lithography, Calibration, Reticles, Optical alignment, Scanners, Image quality, Image sensors, Error analysis

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Proceedings Article | 20 April 2011 Paper

Multifeature focus exposure matrix for tool diagnosis

Zhiyong Yang, Anatoly Burov, Lifeng Duan, Fan Wang

Proceedings Volume 7971, 79712N (2011) https://doi.org/10.1117/12.879350

KEYWORDS: Semiconducting wafers, Error analysis, Lithography, Critical dimension metrology, Photomasks, Scanners, Diagnostics, Statistical analysis, Data processing, Finite element methods

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Proceedings Article | 11 March 2010 Paper

Aerial image model and application to aberration measurement

Anatoly Bourov, Liang Li, Zhiyong Yang, Fan Wang, Lifeng Duan

Proceedings Volume 7640, 764032 (2010) https://doi.org/10.1117/12.848421

KEYWORDS: Sensors, Wavefronts, Image sensors, Image processing, Process modeling, Photomasks, Lithography, Semiconducting wafers, Image acquisition, Fiber optic illuminators

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Showing 5 of 6 publications

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