Dr. Le He
at Shanghai Micro Electronics Equipment Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2012 Paper
Zhiyong Yang, Fanglin Mao, Anatoly Bourov, Jianrui Cheng, Le He
Proceedings Volume 8326, 83262G (2012) https://doi.org/10.1117/12.915975
KEYWORDS: Semiconducting wafers, Image processing, Lithography, Calibration, Reticles, Optical alignment, Scanners, Image quality, Image sensors, Error analysis

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