Yun-Ju (York) Yang
at KLA
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552D (2024) https://doi.org/10.1117/12.3009960
KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552B (2024) https://doi.org/10.1117/12.3009956
KEYWORDS: Overlay metrology, Semiconducting wafers, Machine learning, Scanning electron microscopy, Education and training, Critical dimension metrology, High volume manufacturing, Metrology, Mueller matrices, Spectroscopic ellipsometry

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