Mr. Cheng-Ta Cheng Profile

Cheng-Ta Cheng

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

NZO reduction via small pitch imaging-based overlay targets

Cheng-Ta Cheng, Hong Ching, Foster Huang, Zephyr Liu, Dor Yehuda, Michael Har-Zvi, Chris Hsieh, Penny Lin, York Yang

Proceedings Volume 12955, 1295530 (2024) https://doi.org/10.1117/12.3010703

KEYWORDS: Metrology, Overlay metrology, Inspection, Design, Optical parametric oscillators, Design rules, Semiconducting wafers, Scanners, Etching, Diffractive optical elements

Read Abstract +

Proceedings Article | 10 April 2024 Poster + Paper

Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method

Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, Yun-Ju (York) Yang, Peter Paquet, Houssam Chouaib, Zhengquan Tan

Proceedings Volume 12955, 129552D (2024) https://doi.org/10.1117/12.3009960

KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years