Ms. Yuko Kono Profile

Yuko Kono

at Toshiba Corp

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Author

Publications (3)

Proceedings Article | 12 April 2013 Paper

Source and mask optimization to mitigate hotspots in etch process

Yuko Kono, Yasunobu Kai, Kazuyuki Masukawa, Sayaka Tamaoki, Takaki Hashimoto, Taiki Kimura, Ryota Aburada, Toshiya Kotani

Proceedings Volume 8683, 86830N (2013) https://doi.org/10.1117/12.2011648

KEYWORDS: Source mask optimization, Lithography, Etching, Photomasks, 3D image processing, Photoresist processing, Semiconducting wafers, Reactive ion etching, 3D modeling, Nanoimprint lithography

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Proceedings Article | 24 May 1999 Paper

Cavity design of laterally coupled all-solid state laser arrays with Talbot effect

Yuko Kono, Masahiro Takeoka, Atsushi Uchida, Fumihiko Kannari

Proceedings Volume 3611, (1999) https://doi.org/10.1117/12.349245

KEYWORDS: Mirrors, Nd:YAG lasers, Crystals, Diffraction, Solid state lasers, Semiconductor lasers, Diode pumped solid state lasers, Mode locking, Waveguides, Laser crystals

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Proceedings Article | 13 May 1998 Paper

Laterally coupled all solid state laser array with a three-mirror cavity

Yuko Kono, Akira Nakanishi, Fumihiko Kannari

Proceedings Volume 3267, (1998) https://doi.org/10.1117/12.308122

KEYWORDS: Nd:YAG lasers, Mirrors, Semiconductor lasers, Solid state lasers, Diffraction, Carbon dioxide lasers, Laser development, Laser resonators, Near field, Crystals

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