Yujiro Hikida
at Nikon Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2018 Paper
Yujiro Hikida, Akira Hayakawa, Yoshihiro Teshima, Tomonori Dosho, Noriaki Kasai, Yasushi Yoda, Kazuo Masaki, Yuichi Shibazaki
Proceedings Volume 10587, 105870X (2018) https://doi.org/10.1117/12.2297302
KEYWORDS: Semiconducting wafers, Scanners, Optical alignment, Overlay metrology, Control systems, Manufacturing, Lithography, Process control

Proceedings Article | 24 March 2017 Paper
Proceedings Volume 10147, 1014716 (2017) https://doi.org/10.1117/12.2257659
KEYWORDS: Semiconducting wafers, Optical alignment, Lithography, Manufacturing, Chemical mechanical planarization, Precision measurement, Overlay metrology, Distortion, Optical parametric oscillators, Systems modeling, 3D modeling

Proceedings Article | 18 March 2015 Paper
Takayuki Funatsu, Yusaku Uehara, Yujiro Hikida, Akira Hayakawa, Satoshi Ishiyama, Toru Hirayama, Hirotaka Kono, Yosuke Shirata, Yuichi Shibazaki
Proceedings Volume 9426, 942617 (2015) https://doi.org/10.1117/12.2085735
KEYWORDS: Reticles, Semiconducting wafers, Overlay metrology, Scanners, Transmittance, Distortion, High volume manufacturing, Optical parametric oscillators, Wavefronts, Software development

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