Dr. Takayuki Funatsu Profile

Dr. Takayuki Funatsu

Graduate Student at Nikon Corp

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 18 March 2015 Paper

Paper

Latest performance of ArF immersion scanner NSR-S630D for high-volume manufacturing for 7nm node

Takayuki Funatsu, Yusaku Uehara, Yujiro Hikida, Akira Hayakawa, Satoshi Ishiyama, Toru Hirayama, Hirotaka Kono, Yosuke Shirata, Yuichi Shibazaki

Proceedings Volume 9426, 942617 (2015) https://doi.org/10.1117/12.2085735

KEYWORDS: Reticles, Semiconducting wafers, Overlay metrology, Scanners, Transmittance, Distortion, High volume manufacturing, Optical parametric oscillators, Wavefronts, Software development

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Proceedings Article | 31 March 2014 Paper

Paper

Immersion scanners enabling 10nm half-pitch production and beyond

Hiroyuki Egashira, Yusaku Uehara, Yosuke Shirata, Yuichi Shibazaki, Jun Ishikawa, Takayuki Funatsu, Masanori Ohba

Proceedings Volume 9052, 90521F (2014) https://doi.org/10.1117/12.2046238

KEYWORDS: Semiconducting wafers, Reticles, Distortion, Scanners, Wafer-level optics, Control systems, Wavefronts, Data modeling, Overlay metrology, Calibration

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Proceedings Article | 30 December 2008 Paper

Paper

Formation of a photo-oxidized protective thin film with waterproof and high-power laser tolerance properties

Masataka Murahara, Yuji Sato, Takayuki Funatsu, Takahisa Jitsuno, Yoshiaki Okamoto

Proceedings Volume 7132, 71320K (2008) https://doi.org/10.1117/12.804435

KEYWORDS: Silica, Silicon, Tolerancing, Glasses, Lamps, Oxygen, Excimers, Thin films, Atmospheric plasma, Plasma

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Proceedings Article | 15 January 2007 Paper

Paper

Photochemical adhesion of fused silica optical elements with no adhesive strain

Masataka Murahara, Takayuki Funatsu, Yoshiaki Okamoto

Proceedings Volume 6403, 640322 (2007) https://doi.org/10.1117/12.695987

KEYWORDS: Silicon, Adhesives, Silica, Glasses, Ultraviolet radiation, Epoxies, Oxygen, Transmittance, Xenon, Lamps

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Proceedings Article | 7 February 2006 Paper

Paper

Water-resistant hard coating on optical material by photo-oxidation of silicone oil

Masataka Murahara, Nobuhiro Sato, Takayuki Funatsu, Yoshiaki Okamoto

Proceedings Volume 5991, 599118 (2006) https://doi.org/10.1117/12.638773

KEYWORDS: Silicon, Coating, Refractive index, Lamps, Semiconductor lasers, Xenon, Hard coatings, Excimers, Silica, Glasses

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Proceedings Article | 21 February 2005 Paper

Paper

Photochemical adhesion of fused silica glass for UV transmittance

Masataka Murahara, Takayuki Funatsu, Yoshiaki Okamoto

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.588385

KEYWORDS: Silicon, Glasses, Silica, Ultraviolet radiation, Lamps, Mirrors, Xenon, Transmittance, Oxygen, Excimers

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Proceedings Article | 21 February 2005 Paper

Paper

Laser induced fluorocarbon coating onto fused silica optics

Takayuki Funatsu, Masataka Murahara, Takayuki Okamoto

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.588387

KEYWORDS: Silica, Silicon, Glasses, Silicon films, Oxygen, Coating, Laser optics, Transmittance, Chemical species, Laser applications

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Showing 5 of 7 publications

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