Dr. Xudi Wang Profile

Dr. Xudi Wang

at Hefei Univ of Technology

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Author

Publications (4)

Proceedings Article | 22 October 2010 Paper

Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications

Xudi Wang, Jian Jin, Qisheng Tang, Wenrui Tian, Xiaojun Li, Shaojun Fu, Yanlin Liao

Proceedings Volume 7657, 765710 (2010) https://doi.org/10.1117/12.866228

KEYWORDS: Positron emission tomography, Nanoimprint lithography, Diffraction gratings, Nanolithography, Glasses, Diffraction, Polymers, Nanostructures, Manufacturing, Transparency

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Proceedings Article | 4 January 2008 Paper

Fabrication of CoFe nanostructures by holographic lithography

Zijun Zhang, Xudi Wang, Ying Liu, Yuxian Guo, Yilin Hong, Xiangdong Xu, Shaojun Fu, Pengshou Xu, Jie Wang, Jianwang Cai

Proceedings Volume 6831, 68311B (2008) https://doi.org/10.1117/12.757524

KEYWORDS: Magnetism, Iron, Lithography, Nanostructures, Nanolithography, Oxygen, Cobalt, Tantalum, Gold, Etching

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Proceedings Article | 28 November 2007 Paper

Rapid nanofabrication with high density pattern with UVN30 chemically amplified resist

Xudi Wang, Yifang Chen, Zheng Cui, Shaojun Fu

Proceedings Volume 6724, 67240A (2007) https://doi.org/10.1117/12.782497

KEYWORDS: Electron beam lithography, Silicon, Etching, Deep reactive ion etching, Photoresist processing, Nanolithography, Reactive ion etching, Photomasks, Chemically amplified resists, Standards development

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Proceedings Article | 21 November 2007 Paper

Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint

Xudi Wang, Zijun Zhang, Liangjin Ge, Yanlin Liao, Shaojun Fu

Proceedings Volume 6827, 68271T (2007) https://doi.org/10.1117/12.757290

KEYWORDS: Ultraviolet radiation, Polymethylmethacrylate, Semiconducting wafers, Transmittance, Scanning electron microscopy, Glasses, Wafer bonding, Nanolithography, Polymers, Silicon

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