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Dr. Yifang Chen
at Rutherford Appleton Lab
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 28 November 2007 Paper
Rapid nanofabrication with high density pattern with UVN30 chemically amplified resist
Proceedings Volume 6724, 67240A (2007) https://doi.org/10.1117/12.782497
KEYWORDS: Electron beam lithography, Silicon, Etching, Deep reactive ion etching, Photoresist processing, Nanolithography, Reactive ion etching, Photomasks, Chemically amplified resists, Standards development
Proceedings Article | 14 September 2006 Paper
Micro and nanolithography for photonic meta-materials and photonic nanostructures
Yifang Chen, Alexander Schwanecke, Nikolay Zheludev
Proceedings Volume 6320, 63200P (2006) https://doi.org/10.1117/12.678172
KEYWORDS: Nanoimprint lithography, Electron beam lithography, Metamaterials, Lithography, Dielectrics, Polymethylmethacrylate, Silicon, Silicon carbide, Nanolithography, Photonic nanostructures
SPIE Journal Paper | 1 January 2006
Study of pattern placement error by thermal expansions in nanoimprint lithography
Yifang Chen, Jiarui Tao, Xing-Zhong Zhao, Zheng Cui
JM3, Vol. 5, Issue 01, 011002, (January 2006) https://doi.org/10.1117/12.10.1117/1.2172991
KEYWORDS: Nanoimprint lithography, Silicon, Gallium arsenide, Polymethylmethacrylate, Lithography, Etching, Electron beam lithography, Scanning electron microscopy, Distortion, Dry etching
Proceedings Article | 28 September 2005 Paper
Nanoimprint and soft lithography for planar photonic meta-materials
Proceedings Volume 5955, 59550C (2005) https://doi.org/10.1117/12.620446
KEYWORDS: Nanoimprint lithography, Dielectrics, Lithography, Metamaterials, Silicon, Electron beam lithography, Manufacturing, Dielectric polarization, Etching, Optics manufacturing
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