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Vishal Gandhi
at Univ of Eastern Finland
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Publications (1)
Proceedings Article | 7 March 2014 Paper
Low-loss titanium-dioxide strip waveguides by atomic layer deposition
M. Roussey, M. Häyrinen, A. Säynätjoki, V. Gandhi, L. Karvonen, P. Stenberg, M. Kuittinen, S. Honkanen
Proceedings Volume 8982, 89820E (2014) https://doi.org/10.1117/12.2038912
KEYWORDS: Waveguides, Atomic layer deposition, Wave propagation, Polarization, Scanning electron microscopy, Light wave propagation, Silicon, Etching, Chromium, Titanium dioxide
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