Dr. Petri Stenberg Profile

Dr. Petri Stenberg

at Dispelix Oy

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 27 February 2015 Paper

Cross-slot waveguide Bragg grating

Matthieu Roussey, Petri Stenberg, Arijit Bera, Somnath Paul, Jani Tervo, Markku Kuittinen, Seppo Honkanen

Proceedings Volume 9371, 93711T (2015) https://doi.org/10.1117/12.2077418

KEYWORDS: Waveguides, Polarization, Fiber Bragg gratings, Silicon, Refractive index, Photonics, Photonic crystals, Finite-difference time-domain method, Silica, Nanowires

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Proceedings Article | 7 March 2014 Paper

Low-loss titanium-dioxide strip waveguides by atomic layer deposition

M. Roussey, M. Häyrinen, A. Säynätjoki, V. Gandhi, L. Karvonen, P. Stenberg, M. Kuittinen, S. Honkanen

Proceedings Volume 8982, 89820E (2014) https://doi.org/10.1117/12.2038912

KEYWORDS: Waveguides, Atomic layer deposition, Wave propagation, Polarization, Scanning electron microscopy, Light wave propagation, Silicon, Etching, Chromium, Titanium dioxide

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Proceedings Article | 19 February 2014 Paper

Merged photonic crystal slot waveguide: confining slow modes in tiny volumes

M. Roussey, A. Bera, P. Stenberg, S. Honkanen, M. Kuittinen

Proceedings Volume 8994, 89940C (2014) https://doi.org/10.1117/12.2036258

KEYWORDS: Waveguides, Photonic crystals, Silicon, Atomic layer deposition, Four wave mixing, Finite-difference time-domain method, Coating, Waveguide modes, Electron beam lithography, Titanium dioxide

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SPIE Journal Paper | 2 March 2012

Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers

Muhammad Rizwan Saleem, Petri Stenberg, Seppo Honkanen, Jari Turunen, Muhammad Bilal Khan, Zaffar Muhammad Khan

JM3, Vol. 11, Issue 1, 013007, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.013007

KEYWORDS: Etching, Silicon, Hydrogen, Reflectivity, Polymers, Nanophotonics, Photoresist processing, Electron beams, Heat treatments, Reactive ion etching

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Proceedings Article | 8 February 2012 Paper

HSQ resist for replication stamp in polymers

M. R. Saleem, P. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, J. Turunen

Proceedings Volume 8249, 82490G (2012) https://doi.org/10.1117/12.907862

KEYWORDS: Etching, Silicon, Polymers, Heat treatments, Reflectivity, Hydrogen, Electron beams, Lithography, Reactive ion etching, Semiconducting wafers

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Proceedings Article | 1 June 2011 Paper

Thermal behavior of waveguide gratings

M. Saleem, M. Khan, Z. Khan, P. Stenberg, T. Alasaarela, S. Honkanen, B. Bai, J. Turunen, P. Vahimaa

Proceedings Volume 8069, 80690A (2011) https://doi.org/10.1117/12.885708

KEYWORDS: Reflectivity, Waveguides, Polymers, Atomic layer deposition, Optical design, Thermal optics, Refractive index, Diffraction gratings, Temperature metrology, Titanium dioxide

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Proceedings Article | 14 February 2011 Paper

Hydrogen silsesquioxane (HSQ): a perfect negative tone resist for developing nanostructure patterns on a silicon platform

G. Singh, P. Stenberg, P. Vahima, M. Kuittinen, R. P. Yadav, V. Janyani

Proceedings Volume 7927, 792715 (2011) https://doi.org/10.1117/12.874851

KEYWORDS: Silicon, Electron beam lithography, Hydrogen, Nanostructures, Photoresist processing, Lithography, Scanning electron microscopy, Silicon films, Semiconducting wafers, Physics

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Showing 5 of 7 publications

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