Prof. Sung Il Ahn Profile

Prof. Sung Il Ahn

at Pohang Univ of Science and Technology

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Author

Publications (3)

Proceedings Article | 31 March 2010 Paper

Changes in vertical PAG distribution inside photoresist due to the variation of concentration

Jae Hyun Kim, Sung Il Ahn, Jin Goo Yoon, Youngho Kim, Seung-Ki Chae, Wang-Cheol Zin

Proceedings Volume 7639, 76391P (2010) https://doi.org/10.1117/12.858362

KEYWORDS: Photoresist materials, Interfaces, Reflectivity, Molecules, X-rays, Polymers, Molecular interactions, Polymer thin films, Lithography, Thin films

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Proceedings Article | 1 April 2009 Paper

Analysis of molecular resist distribution in a resist film by using x-ray reflectivity

Jeongsik Kim, Jae-Woo Lee, Deogbae Kim, Jaehyun Kim, Sung-Il Ahn, Wang-Cheol Zin

Proceedings Volume 7273, 72732W (2009) https://doi.org/10.1117/12.814449

KEYWORDS: X-rays, Reflectivity, Glasses, Line width roughness, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Chemical analysis, Molecular interactions, Polymers

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Proceedings Article | 11 April 2006 Paper

The effect of water-contact and evaporation on the roughness of photoresist for immersion lithography

Sung Il Ahn, Jae Hyun Kim, Wang-Cheol Zin

Proceedings Volume 6153, 615326 (2006) https://doi.org/10.1117/12.676283

KEYWORDS: Photoresist materials, Diffusion, Atomic force microscopy, Immersion lithography, Polymers, Line edge roughness, Polymer thin films, Water, Edge roughness, Absorption

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