CONFERENCE PROCEEDINGS
Advanced Search
Steven Lubin
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Contour metrology for process matching and OPC qualification with machine learning-based site selection
Proceedings Volume 12955, 129553N (2024) https://doi.org/10.1117/12.3012681
KEYWORDS: Metrology, Scanning electron microscopy, Contour extraction, Machine learning, Optical proximity correction, Image processing, Electronic design automation, Design
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top