Prof. Stephen Yeates Profile

Prof. Stephen Yeates

at Univ of Manchester

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Publications (2)

Proceedings Article | 3 October 2018 Paper

Using 3D Monte Carlo simulation to develop resists for next-generation lithography

Hayden Alty, Scott Lewis, Stephen Yeates, Richard E. Winpenny

Proceedings Volume 10810, 1081011 (2018) https://doi.org/10.1117/12.2501813

KEYWORDS: Monte Carlo methods, Scattering, Chromium, Molecules, Silicon, Photomasks, Electron beam lithography, Lithography, 3D modeling

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Proceedings Article | 3 October 2018 Paper

Design and implementation of the next generation electron beam resists for the production of EUVL photomasks

Scott Lewis, Guy DeRose, Hayden Alty, Matthew Hunt, Jarvis Li, Alex Werthiem, Trevor Fowler, Sang Kook Lee, Christopher Muryn, Grigore Timco, Axel Scherer, Stephen Yeates, Richard Winpenny

Proceedings Volume 10810, 108100N (2018) https://doi.org/10.1117/12.2501808

KEYWORDS: Chromium, Silicon, Etching, Molecules, Scattering, Nanostructures, Monte Carlo methods, Photomasks, Extreme ultraviolet lithography, Electron beam lithography

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